Characteristic Analysis on Monodrome Modal Algorithm Control and Its Application
Nano drive parts based on thermal deformation is a new drive method, it can afford more than 5000N feeding force, but it has great time-lag change which make it very difficult to control, so it is critical to choose control method. In order to apply monodrome modal algorithm control (MMAC) to nano feed system having large time-lag, A new step by step fitting method by the experimental results to confirm model parameters of control system was presented, and the characteristics of control system was analyzed. Simulation results show that there is periodic error generated by model building, when the number of terms (N) adopted in predicative modal of non-parametric and monotonic is lesser, i.e. little N generated periodic error and there is a lager error when the sampling point are near N2N3N, but with the increasing of number of terms (N), error becomes little, so comprehensive information and error depend on the number of term (N). Predicative step is related to response speed and robust characteristic, there are longer response speed and better robust characteristic, when the predicative step is added. 15nm feeding accuracy was achieved by experiments, when the MMAC was used in nano drive parts having large time-lag change.
Chunli BAI, Sishen XIE, Xing ZHU
X. X. Hu "Characteristic Analysis on Monodrome Modal Algorithm Control and Its Application", Solid State Phenomena, Vols. 121-123, pp. 1329-1332, 2007