Characteristics of 2.45GHz Microwave Plasma by Langmuir Probe Measurements

Abstract:

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The characteristics, such as electron temperature and the electron density, of CF4/Ar discharge in 2.45GHz microwave has been investigated by using a Langmuir probe with the microwave power and position. The results showed that the electron temperature and the electron density decrease with increasing distance from the plasma source. Increasing power enhances the dissociation and ionization of gas, and increases the electron densities. The electron temperature was decreased by reducing the mean free path of electrons with increasing microwave power. The electron temperature is 7.63 ~ 2.49 eV, and the electron density is 0.85×1011 ~ 4.3×1011 cm-3. From obtained electron energy distribution function, we known that high energy electron decreased with increasing microwave power and distance from the plasma source. The generated plasma by developed our system has good quality as results of Debye length λD = 35.8 ~ 67.3 μm, and Ln(ND) = 33.4 ~ 35.2.

Info:

Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

1621-1624

DOI:

10.4028/www.scientific.net/SSP.124-126.1621

Citation:

S. Y. Choi et al., "Characteristics of 2.45GHz Microwave Plasma by Langmuir Probe Measurements", Solid State Phenomena, Vols. 124-126, pp. 1621-1624, 2007

Online since:

June 2007

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Price:

$35.00

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