Hard a-Si3N4/MeNx Nanocomposite Coatings with High Thermal Stability and High Oxidation Resistance

Jindřich Musil; P. Zeman

doi:10.4028/www.scientific.net/SSP.127.31

Paper Titles

Control of Texture in Intermetallic Compounds by Thermomechanical Processing
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Interfaces in Joints and Composites Composed of Hard Materials and Metals
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Hard a-Si₃N₄/MeN_x Nanocomposite Coatings with High Thermal Stability and High Oxidation Resistance
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Development of Telerobotic System for Remote Welding Operations in Unstructured Environment
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Distribution of Zn and Interfacial Microstructure of Braze-Welding CMT Joints between Aluminium and Galvanized Steel Sheets
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Reverse Monte Carlo Modeling of Atomic Configuration for Amorphous Materials
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Hybrid Simulations for Desinging of Nano-Interfacial Structures
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HomeSolid State PhenomenaSolid State Phenomena Vol. 127Hard a-Si3N4/MeNx Nanocomposite Coatings with High...

Hard a-Si₃N₄/MeN_x Nanocomposite Coatings with High Thermal Stability and High Oxidation Resistance

Abstract:

This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (m=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

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Periodical:

Solid State Phenomena (Volume 127)

Pages:

31-36

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.127.31

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Online since:

September 2007

Authors:

Jindřich Musil, P. Zeman

Keywords:

a-Si₃N₄/MeN_x Composites, DC Reactive Magnetron Sputtering, Mechanical Property, Microstructure, Oxidation Resistance, Structure, Surface Morphology, ϒ-Phase

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