Thickness Measurement of Thin Textured Films by a Novel X-Ray Diffraction Method Accounting for Secondary Extinction

Abstract:

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Accounting for secondary extinction (SE) of the intensities measured from a textured film by means of conventional X-ray diffractometer, a new X-ray diffraction method is described for determination of film thickness. Physically, the problem is restricted to using a reflection pair corresponding to the main component of the texture. As model sample a vacuum-deposited silver thin film is used.

Info:

Periodical:

Solid State Phenomena (Volume 130)

Edited by:

Danuta Stróż & Małgorzata Karolus

Pages:

43-46

DOI:

10.4028/www.scientific.net/SSP.130.43

Citation:

I. Tomov and S. Vassilev, "Thickness Measurement of Thin Textured Films by a Novel X-Ray Diffraction Method Accounting for Secondary Extinction", Solid State Phenomena, Vol. 130, pp. 43-46, 2007

Online since:

December 2007

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$35.00

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