The Mechanism of Defects Formation in Silicon Substrates

Abstract:

Article Preview

Components of navigating devices can be affected by acoustic emission and vibration. Therefore prototype samples and electronic components must be tested in such conditions. Heterostructures, which destructed under the action of external physical factors and kinetics of formations of porous defects in silicon substrates, were analyzed.

Info:

Periodical:

Solid State Phenomena (Volume 165)

Edited by:

Andrejus H. Marcinkevičius and Algirdas V.Valiulis

Pages:

7-12

DOI:

10.4028/www.scientific.net/SSP.165.7

Citation:

A. Bogorosh et al., "The Mechanism of Defects Formation in Silicon Substrates", Solid State Phenomena, Vol. 165, pp. 7-12, 2010

Online since:

June 2010

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Price:

$35.00

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