The Mechanism of Defects Formation in Silicon Substrates
Components of navigating devices can be affected by acoustic emission and vibration. Therefore prototype samples and electronic components must be tested in such conditions. Heterostructures, which destructed under the action of external physical factors and kinetics of formations of porous defects in silicon substrates, were analyzed.
Andrejus H. Marcinkevičius and Algirdas V.Valiulis
A. Bogorosh et al., "The Mechanism of Defects Formation in Silicon Substrates", Solid State Phenomena, Vol. 165, pp. 7-12, 2010