The Mechanism of Defects Formation in Silicon Substrates

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Abstract:

Components of navigating devices can be affected by acoustic emission and vibration. Therefore prototype samples and electronic components must be tested in such conditions. Heterostructures, which destructed under the action of external physical factors and kinetics of formations of porous defects in silicon substrates, were analyzed.

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Solid State Phenomena (Volume 165)

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7-12

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June 2010

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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