Growth and Characterization of Well-Aligned RuO₂/R-TiO₂ Heteronanostructures on Sapphire (100) Substrates by Reactive Magnetron Sputtering

Abstract:

We report the growth of well-aligned RuO2/R-TiO2 heteronanostructures on sapphire (100) substrates by reactive magnetron sputtering using Ti and Ru metal targets under different conditions. The surface morphology and structural properties of the as-deposited heteronanostructures were characterized using field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), transmission electron microscopy (TEM) and selected-area electron diffractometry (SAED). The FESEM micrographs and XRD patterns indicated the growth of vertically aligned RuO2(001) nanotubes and twinned V-shaped RuO2(101) nanowedges (NWs) on top of R-TiO2 nanorods under different sputtering pressures. TEM and SAED characterizations of the V-shaped RuO2 NWs showed that the NWs are crystalline RuO2 with twin planes of (101) and twin direction of [ 01] at the V-junction.

• Periodical: Solid State Phenomena (Volume 170)
• Pages: 78-82
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.170.78
• Online since: April 2011
• Authors: Hung Pin Hsu, Ying Sheng Huang, Chien Nan Yeh, Yi Min Chen, Dah Shyang Tsai, Kwong Kau Tiong
• Keywords: Field Emission Scanning Electron Microscopy (FESEM), RuO₂, TiO₂, X-Ray Diffraction (XRD)

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