Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors
A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system.
G. H. Li et al., "Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors", Solid State Phenomena, Vol. 175, pp. 357-361, 2011