Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors

Abstract:

Article Preview

A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system.

Info:

Periodical:

Solid State Phenomena (Volume 175)

Edited by:

Xipeng Xu

Pages:

357-361

DOI:

10.4028/www.scientific.net/SSP.175.357

Citation:

G. H. Li et al., "Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors", Solid State Phenomena, Vol. 175, pp. 357-361, 2011

Online since:

June 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.