Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors

Guang Hui Li; Peng Wu; Xiao Long Ni; Wen Fang Peng; Guang Yu Tan

doi:10.4028/www.scientific.net/SSP.175.357

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Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors
p.357

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Study on Speed and Acceleration Characteristics of 100 nm Scale Motion Platform Driven by Linear Servo Motors

Abstract:

A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system.