Prototype System for Plasma Film Surface Modification

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Abstract:

The paper presents a prototype system for modifying surface of a film that can be used in various industries. System allows for two-sided modification of the surface of the film under reduced pressure with a low temperature plasma use. During the surface treatment process, it is possible to dispense chemicals into vacuum chamber in gaseous form, which can create a thin coating on the surface of the film. The system enables the film modification process parameterization while monitoring its key parameters.

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Periodical:

Solid State Phenomena (Volume 223)

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146-152

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Online since:

November 2014

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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