Raman Studies of Amorphous Carbon Phase in Diamond Films Grown by Hot-Filament CVD

Abstract:

Microcrystalline diamond thin films have been prepared using hot filament CVD technique with a mixture of H₂/ CH₃OH as the reactant gas. We demonstrated that the ratio of H₂ / CH₃OH in the reactant gas and total pressure in reactor chamber plays an important role in control of the grain size of diamonds and the growth of the microcrystalline diamonds. The object of this article is to summarize and discuss relation between structural properties of different diamond layers and technological parameters of their synthesis. The physical properties of the Hot Filament CVD microcrystalline diamond films are analyzed by Scanning Electron Microscopy and Raman spectroscopy. The sample grain size varies from 200 nm to 10 μm and their quality was checked on basis of 1332 cm⁻¹ diamond peak. The ratio of sp³/sp² carbon bonds was determined by 1550 cm⁻¹ G band and 1350 cm^-1 D band in the Raman spectrum

• Periodical: Solid State Phenomena (Volume 237)
• Pages: 263-267
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.237.263
• Online since: August 2015
• Authors: Agnieszka Banaszak-Piechowska*, Piotr Malinowski
• Keywords: CVD, Diamond, Raman Spectroscopy, SEM

References

[1] Chow, L., et al., Growth of (100) oriented diamond thin films on ball structure diamond-like particles. Journal of materials research, 1992. 7(07): pp.1606-1609.

DOI: 10.1557/jmr.1992.1606

[2] Chow, L., et al., Fullerene formation during production of chemical vapor deposited diamond. Applied physics letters, 1995. 66(4): pp.430-432.

DOI: 10.1063/1.114046

[3] Zhou, D., et al., Control of diamond film microstructure by Ar additions to CH 4/H 2 microwave plasmas. Journal of Applied Physics, 1998. 84(4): p.1981-(1989).

DOI: 10.1063/1.368331

[4] Zhou, D., et al., Synthesis and electron field emission of nanocrystalline diamond thin films grown from N 2/CH 4 microwave plasmas. Journal of applied physics, 1997. 82(9): pp.4546-4550.

DOI: 10.1063/1.366190

[5] Geis, M.W., et al., A new surface electron-emission mechanism in diamond cathodes. Nature, 1998. 393(6684): pp.431-435.

DOI: 10.1038/30900

[6] Mosińska, L., et al., Diamond as a transducer material for the production of biosensors. Przemysl Chemiczny, 2013. 92(6): pp.919-923.

[7] Fabisiak, K., et al., The Undoped CVD Diamond Electrode: The Effect of Surface Pretreatment on its Electrochemical Properties. Advanced Engineering Materials, 2013. 15(10): pp.935-940.

DOI: 10.1002/adem.201200351

[8] Filik, J., Raman spectroscopy: a simple, non-destructive way to characterise diamond and diamond-like materials. Spectroscopy Europe, 2005. 17(5): p.10.

[9] Mosińska, L., et al., Effect of sp2 phase content on hydrophobicity of diamond layers. PRZEMYSŁ CHEMICZNY, 2014. 93(9): pp.1587-1590.

[10] Fabisiak, K., et al., The influence of working gas on CVD diamond quality. Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2012. 177(15): pp.1352-1357.

DOI: 10.1016/j.mseb.2011.12.013

[11] Mosinska, L., et al., Undoped CVD diamond films for electrochemical applications. Electrochimica Acta, 2013. 104: pp.481-486.

DOI: 10.1016/j.electacta.2013.03.111

[12] McNamara, K.M., et al., Evaluation of diamond films by nuclear magnetic resonance and Raman spectroscopy. Diamond and Related Materials, 1992. 1(12): pp.1145-1155.

DOI: 10.1016/0925-9635(92)90088-6

[13] Adamopoulos, G., et al., Hydrogen content estimation of hydrogenated amorphous carbon by visible Raman spectroscopy. Journal of Applied Physics, 2004. 96(11): pp.6348-6352.

DOI: 10.1063/1.1811397

[14] Yoshikawa, M. Raman spectra of diamondlike amorphous carbon films. in Materials Science Forum. 1991. Trans Tech Publ.

DOI: 10.4028/www.scientific.net/msf.52-53.365

[15] Casiraghi, C., et al., Bonding in hydrogenated diamond-like carbon by Raman spectroscopy. Diamond and Related Materials, 2005. 14(3–7): pp.1098-1102.

DOI: 10.1016/j.diamond.2004.10.030

[16] Ballutaud, D., et al., Sp3/sp2 character of the carbon and hydrogen configuration in micro- and nanocrystalline diamond. Diamond and Related Materials, 2008. 17(4–5): pp.451-456.

DOI: 10.1016/j.diamond.2007.10.004