Cylindrical Magnetron with Dynamic Magnetic Field

Abstract:

The formation of anti-wear coatings on the inner surface of steel cylinders and pipes presents a difficult process-related problem for PA PVD methods. This problem is associated with a strictly limited geometry of the reaction space and dimensions of plasma sputtering-sources. Among the main factors behind physical and chemical phenomena occurring the reaction space, formed within a low-temperature plasma and at its boundaries with a solid object, there are type, concentration, unobstructed path for reacting substances, as well as values and geometry of electrical/magnetic/thermal fields [1-5]. In the research on the plasma-based technology in confined space, the lowest possible distance between the surface being modified and the source of ions of metallic and gaseous elements is taken into account.

• Periodical: Solid State Phenomena (Volume 237)
• Pages: 61-67
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.237.61
• Online since: August 2015
• Authors: Marek Betiuk*
• Keywords: Coatings, Cr, CrN, Magnetron, Magnetrons Cylindrical PVD, Plasma

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DOI: 10.1115/1.2172963

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