Physical-Chemical Properties of Molybdenum Films Prepared with Magnetron Sputtering

Abstract:

The methods for evaluating the quality of the protective coating to the size etching of quartz glass with hydrofluoric acid were proposed. Molybdenum coating is generated with the installation NIKA 2012 TN by magnetron sputtering. Quartz glass with a roughness of Ra less than 1 nm was used. Discontinuity of coating was determined by the method of electron microscopy and energy dispersive analysis. Mathematical modeling of the hydrofluoric acid diffusion process performend via the molybdenum film was implemented. X-ray analysis of the coating was carried out to determine the residual internal stresses. We concluded that the studied phenomena affect the quality of the glass surface after etching.

• Periodical: Solid State Phenomena (Volume 265)
• Pages: 3-8
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.265.3
• Online since: September 2017
• Authors: Nataliya Shaburova*, T.D. Ratmanov, A.M. Minkin
• Keywords: Accelerometers, Magnetron Sputtering, Microelectromechanical Sensors, Molybdenum Films, Quartz Glass

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