Hydrogen Gas Sensing Characterizations Based on Nanocrystalline SnO₂ Thin Films Grown on SiO₂/Si and Al₂O₃ Substrates

Abstract:

High-quality nanocrystalline (NC) SnO₂ thin films were grown on SiO₂/Si and Al₂O₃ substrates using sol–gel spin coating method. The structural properties, surface morphologies and gas sensing properties of the NC SnO₂ were investigated. XRD measurements showed a tetragonal rutile structure and the diffraction peaks for NC SnO₂ thin films grown on Al₂O₃ substrates outperformed those of NC SnO₂ films grown on SiO₂/Si substrates. The surface morphology of the annealed SnO₂ thin films at 500 °C appeared as polycrystalline with uniform nanoparticle distribution. Hydrogen (H₂) gas sensing performance of the NC SnO₂ was examined for H₂ concentrations ranging from 150 ppm to 1000 ppm at different temperatures (room temperature, 75 and 125 °C) for over 50 min. The room temperature sensitivities for H₂ gas sensors based on NC SnO₂ thin films grown on Al₂O₃ and SiO₂/Si substrates was 2570% and 600%, respectively upon exposure to 1000 ppm of H₂ gas. While the sensitivity values at 125 °C increased to 9200% and 1950%, respectively.

• Periodical: Solid State Phenomena (Volume 268)
• Pages: 244-248
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.268.244
• Online since: October 2017
• Authors: Abu Hassan Haslan*, Imad Hussein Kadhim
• Keywords: Hydrogen, Nanocrystalline SnO₂, Room Temperature, Sensing, Sol-Gel, Thin Film

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