Ion Implantation in Multilayers

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Periodical:

Solid State Phenomena (Volumes 30-31)

Edited by:

A. Dunlop, F. Rullier-Albenque, C. Jaouen, C. Templier and J. Davenas

Pages:

467-476

DOI:

10.4028/www.scientific.net/SSP.30-31.467

Citation:

E. Ligeon and A. Hamoudi, "Ion Implantation in Multilayers", Solid State Phenomena, Vols. 30-31, pp. 467-476, 1992

Online since:

January 1992

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$35.00

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