Comparative Study of Optical Silicon Nanomachining Experimental Results and MD Simulation Outputs

Abstract:

The high strength and good optical performance offered by optical grade silicon could be considered as the reason for its wide usage as optical materials in many industries including electronic, metrology, infrared (IR) optics and solar cells. Due to this, nanoscale manufacturing of these products requires superior quality and enhanced functional performance of the produced materials. Because recent studies have been focusing on correlating both surface and subsurface nature alterations with better functional performance, an MD study of the experiment was carried out in comparison with experiment to match the observed MD model features to the experimental result obtained. The MD study was observed to conform with the R_a result as obtained in the experiment.

• Periodical: Solid State Phenomena (Volume 305)
• Pages: 185-190
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.305.185
• Online since: June 2020
• Authors: Lukman N. Abdulkadir*, Khaled Abou-El-Hossein, Muhammad Mukhtar Liman
• Keywords: Potential Energy Function, Single Point Diamond Turning (SPDT), Subsurface Damage, Surface Roughness

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