Research Progress of Nitride Coating Process Prepared by Cathodic Arc Ion Plating

Abstract:

As the main process of carbide tool coating fabrication, cathodic arc ion plating plays an important role in modern industrial production. This paper introduces the influence of process parameter selection on the coating properties of tools by cathodic arc ion plating. The process parameters mainly include nitrogen partial pressure, negative bias pressure and arc current, and the coating properties are mainly characterized by deposition rate, phase composition, coating hardness and surface quality. It can optimize the selection of process parameters on modern industrial production.

• Periodical: Solid State Phenomena (Volume 340)
• Pages: 27-32
• DOI: https://doi.org/10.4028/p-08ojc3
• Online since: December 2022
• Authors: Xin Wu Wang*, Hao Bin Sun, Hua Zhang, Chang Ye Li, Cheng Liang Zhao, Shou Ji Si, Hai Bin Yao, Hui Jun Yu, Chuan Zhong Chen
• Keywords: Arc Ion Plating, Microstructure, Nitride Coating, Property

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