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HomeSolid State PhenomenaSolid State Phenomena Vols. 37-38Structural, Electrical and Optical Properties of...

Structural, Electrical and Optical Properties of Reactive Magnetron Sputtered Poycrystalline ZnO: Al Films as a Function of the Oxygen Partial Pressure during Deposition

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Polycrystalline Semiconductors III

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Periodical:

Solid State Phenomena (Volumes 37-38)

Pages:

433-440

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.37-38.433

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Online since:

March 1994

Authors:

K. Ellmer, R. Mientus

Keywords:

Electrical Conductivity, Optical Transmission, Reactive Magnetron Sputtering, Stoichiometry, Transparent Conductive Oxide Films

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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