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Effects of Composition and Layer Number on the Mechanical Properties of Multilayered Si-DLC / DLC Coatings

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Abstract:

Diamond-like carbon (DLC) coatings are valued for their excellent wear resistance and ability to extend the life of mechanical components, supporting resource conservation. However, high residual stress and poor adhesion limit their practical use. Silicon-doped DLC (Si-DLC) can reduce stress and improve adhesion, though excess silicon lowers hardness, creating a trade-off. This study aimed to optimize both adhesion and hardness by adjusting the silicon-containing gas ratio and the number of stacked layers. Si-DLC was deposited on austenitic stainless steel (SUS304) using acetylene (C2H2) and tetramethylsilane (TMS) via plasma enhanced chemical vapor deposition (PECVD) at 170 °C with a 1.2 µm thickness. Higher TMS ratios increased silicon and hydrogen content in the Si-DLC layer. More layers reduced hardness and low-load wear resistance but enhanced durability under high loads.

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Periodical:

Solid State Phenomena (Volume 386)

Pages:

85-92

DOI:

https://doi.org/10.4028/p-qr9MpO

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Online since:

March 2026

Authors:

Atsuki Okano*, Akio Nishimoto

Keywords:

DLC Coating, Multilayer Structure, Plasma CVD, Stainless Steel, Surface Engineering

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© 2026 Trans Tech Publications Ltd. All Rights Reserved

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