TiN Thin Films Preparation, Structural and Electrical Proberties

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Periodical:

Solid State Phenomena (Volumes 39-40)

Edited by:

Wladyslaw Bogusz, Waclaw Jakubowski and Franciszek Krok

Pages:

139-142

DOI:

10.4028/www.scientific.net/SSP.39-40.139

Citation:

A. Tarniowy et al., "TiN Thin Films Preparation, Structural and Electrical Proberties", Solid State Phenomena, Vols. 39-40, pp. 139-142, 1994

Online since:

December 1994

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Price:

$35.00

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