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TiN Thin Films Preparation, Structural and Electrical Proberties

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Periodical:

Solid State Phenomena (Volumes 39-40)

Pages:

139-142

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.39-40.139

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Online since:

December 1994

Authors:

A. Tarniowy, R. Mania, M. Rekas

Keywords:

AES, Electrical Conductivity, TEM, Thin Film, Titanium Nitride, X-Ray Diffraction (XRD)

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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