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Experiment on Non-Uniformity of Material Removal on Wafer surface in Wafer CMP Jianxiu Su1,a, Jiaxi Du1,b, Xiqu Chen1,c , Xin Ning1 and Renke Kang2 1 Henan Institute of Science and Technology, Xinxiang 453003, China 2Key Laboratory for Precision and Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian 116024, China ajxsu2008@people.com.cn, bdujx@163.com, cchxq@126.com Keywords: Chemical mechanical polishing, Material Removal, Non-uniformity.
This result could reveal the material removal mechanism of wafer CMP from the aspect of the non-uniformity of material removal.
Acknowledgements The authors acknowledge the Supported by the Key Project of Science and Technology R & D Program of Henan Province (102102210405), the Research Project program of Natural science of the Education Department of Henan Province (2009A460004) , and Funded by Science and Technology Innovation Program of Henan Institute of Science and Technology.
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Kamil, Preparation of PVA/Corn Starch Blend Films and Studying the Influence of Gamma Irradiation on Mechanical Properties, International Journal of Materials Science and Applications 3 (2014) 25-28
Sedlacekova, Food Packaging Materials: Comparison of Materials Used for Packaging Purposes, Bachelor Thesis, Helsinki Metropolia University of Applied Sciences, 2017
Hasirci, PCL and PCL-based materials in biomedical application, Journal of Biomaterials Science, Polymer Edition 29 (2018) 863-893
Chiralt, Combination of Poly(lactic) Acid and Starch for Biodegradable Food Packaging, Material MDPI Journal, Materials 10 (2017)
Bressler, Progress in bio-based plastics and plasticizing modifications, Journal of Materials Chemistry A.

As shown in Fig.1, the side length of the 0.1 kg cubic concentrated explosive charge is 0.04 m, with its mesh size 5 mm, and as the blasting center distance increases, the mesh has a very sparse gradient coefficient of two. 73926 nodes and 68688 elements were created in total, and all the materials were divided into Eulerian meshes, which allows multiple materials in one element.
In an Euler solver, the numerical mesh remains undeformed, while several kinds of materials are allowed to flow freely from one element to another.
This solver is suitable for modeling fluid phase materials, such as gas or liquid.
International Journal of Rock Mechanics & Mining Sciences. 44(2007)730–738 [3] Yang Xiumin, Jin Yiliang, Liu Dianzhong.
INTERNATIONAL JOURNAL FOR NUMERICAL AND ANALYTICAL METHODS IN GEOMECHANICS.

Usually, Titanium and Aluminium stacked materials are drilled before aircraft assembly and this poses a major challenge in machining due to the different machinability of materials.
Journal of Materials Processing Technology, 259:270-281, September 2018
Applied Sciences, 10:845, January 2020
Applied Science and Manufacturing, 2019
Modeling thread milling forces in mini-hole in dental metallic materials.

Construction sector development which is impossible without creation of knowledge- and science-intensive materials and technologies oriented to a wide range of practice is an important tool for achieving the goal.
Their distinctive feature is the focus on the primary use of local raw materials, flexibility in production and use organization, high science-intensive and modernization potential.
Saidumov, High-performance SCC-concrete at earthquake resistant construction, International Journal of Environmental and Science Education. 11.18 (2016) 12779-12786
Shapovalov, Features of application of high-mg technogenic raw materials as a component of composite binders, Research Journal of Applied Sciences. 9.11 (2014) 779-783
Karakurt, Properties of the autoclaved aerated concrete produced from coal bottom ash, Journal of materials processing technology. 209.2 (2009) 767-773

Biomedical materials is the newest branch of biomedical science[1-3].
It is a frontier subject formed by the intersection of biology, medicine, chemistry, physics and materials science.
Femtosecond Laser Processing of Polymer Materials The advantages of macromolecular materials in cost, mechanical properties, functional pertinence and technological complexity make it gradually replace some inorganic materials or metals, thus a variety of macromolecular materials based devices have appeared.
Optical Materials, 2017, 73:25-32
Journal of Materials Processing Technology, 2016, 241:120-128

Due to the great developments in modern science and technology, the application field of porous metal materials has been largely extended, and the demand for materials has also been increased.
With the development of science & technology and the improvement on the demand for industrial technique, membrane materials and its preparing technology has been rapidly advanced.
Catalytic porous materials are special functional materials with active elements distributed in the porous material[4].
This makes powder metallurgical technology one of the most rapidly developed branches in the field of material science and engineering.
The Chinese Journal of Nonferrous Metals 2004，Vol.14 No.2：320-322 [5] L.V.

References [1] Kuzel, R., Janecek, M., Matej, Z., Cizek, J., Dopita, M., and Srba, O., Microstructure of Equal-Channel Angular Pressed Cu and Cu-Zr Samples Studied by Different Methods, Metallurgical and Materials Transactions A-Physical Metallurgy and Materials Science, 41(2010) 1174-1190
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Shadi Shahedipour-Sandvik5,m, Bingjun Li6,n and Jung Han6,o 1Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, NY 11794, USA 2Department of Materials Science & Engineering, North Carolina State University, Raleigh, NC 27695, USA 3Adroit Materials, Inc., 2054 Kildaire Farm Road, Suite 205, Cary, NC 27518 4Institute of High Pressure Physics Polish Academy of Sciences, Sokolowska 29/37, 01-142 Warsaw, Poland 5SUNY Polytechnic Institute, Albany, NY 12203, USA 6Department of Electrical Engineering, Yale University, New Haven, CT 06511, USA ayafei.liu@stonybrook.edu, bhongyu.peng@stonybrook.edu, czeyu.chen@stonybrook.edu, dqianyu.cheng@stonybrook.edu, eshanshan.hu@stonybrook.edu, fbalaji.raghothamachar@stonybrook.edu, gmichael.dudley@stonybrook.edu, hcollazo@ncsu.edu, isitar@ncsu.edu, jjames@adroitmaterials.com, kbocian@unipress.waw.pl, lmeyersv@sunypoly.edu, msshahedipour-sandvik@sunypoly.edu, nbingjun.li@yale.edu, ojung.han@yale.edu Keywords
Selective area etching and regrowth is another method to realize the device structures on GaN materials.
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Guo, et al., Journal of Electronic Materials 47 (2018) 903-909
Yao, et al., Journal of Electronic Materials 47 (2018) 5007-5012

Alektorovc Institute of Metallurgy of the Ural ranch of the Russian Academy of Sciences, 101 Amundsen St., Ekaterinburg, 620016, Russia aandrey.dmitriev@mail.ru, b20procents@mail.ru, cprv-imet@mail.ru Keywords: cohesion zone, softening, iron ore materials, degree of reduction, blast furnace smelting.
Therefore, the characteristics of these raw materials determine the gas permeability of the charge in the cohesion zone.
Radial non-uniformity has two main sources: loading of charge materials through the top and the tuyere supply.
Chesnokov, Methodical basis of investigation of influence of the iron ore materials and coke metallurgical characteristics on the blast furnace smelting efficiency, Advanced Materials Research, 602-604 (2013) 365-375
Alektorov, Study of the main metallurgical characteristics of iron ore raw materials (sinter and pellets), IOP Conference Series: Materials Science and Engineering, 966(1) (2020) 012061.