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De Gendt1,2, 1 1 1 IMEC Interuniversity Microelectronics Center, Kapeldreef 75, B-3001 Leuven, Belgium 2 Katholieke Universiteit Leuven, Celestijnenlaan 200F B-3001, Leuven, Belgium avandorpd@imec.be Keywords: InAs, etching, reoxidation, cleaning, III-V channel, fin-FET Introduction At present, the performance enhancement for Si-based transistors can no longer be guaranteed due to intrinsic mobility issues.
The etch rate is targeted in the <0.1-10 nm min-1 range [3].
The etch rate decreases further when the HCl concentration is increased to 1 M.
In Figure 1(b) the etch rate versus HCl concentration is shown.
References [1] J.A. del Alamo: Nature 479 (2011), p. 317 [2] K.A.

Fig. 1 Schematic diagram of graft copolymerization Results and Discussions The synthesis design of graft copolymers with different AA and AMPSis listed in Table 1.
H2O/g / ºC Initiator monomers (NH4)2S2O8/g NaHSO3/g ratio AA/g AMPS/g ratio 1 80 75 8 2.7 3:1 20 10 2:1 2 80 75 8 8 1:1 20 10 2:1 3 80 75 8 8 1:1 30 10 3:1 Many factors affect the polymerization process and properties of the final polymer AA-AMPS, such as the monomer mass ratio, reaction concentration, initiator dosage, pH, chain transfer agent, reaction time, stirring speed, the method of monomer addition and reaction temperature.
In this study, the temperature is 75ºC, and the ratio of (NH4)2S2O8/ NaHSO3 is 3:1, the ratio of AA to AMPS is 2:1 and 3:1, the content of monomers and initiator is 34wt%.
Reference [1] F.
Preparation and analysis of a polyacrylate grinding aid for grinding calcium carbonate in an ultrafine wet grinding process [J].Powder Technology, 2014(254),470-479.

Results Fig. 1 shows the TGA plot of MG30 and TMG30 polymer electrolytes.
The peak of ion pairs (LiCF3SO3, Li(CF3SO3)2-, Li(CF3SO3)32-) is located at 1045-1040 cm-1 and the peak of ion aggregates (Li2CF3SO3+, Li3CF3SO32+) is located at 1053-1049 cm-1 [20].
References [1] H.
Stab. 87 (2005) 479–486
Gupta, Natural polymer-based electrolytes for electrochemical devices: a review, Ionics (Kiel). 17 (2011) 479–483

(1), where, v is Poisson ratio; E represents elastic modulus; indicates internal friction angle.
References [1] I.C.Cormeau, O.C.Zienkiewicz.
Eng, 9(1) (1975)109-127
Zhang, Super Gravity Dam Generalized Damage Study, Advanced Materials Research. 479-481 (2012) 421-435 [3] Y.
Ren, Fuzzy Stochastic Generalized Reliability Studies on Embankment Systems Based on First-order Approximation Theorem, Water Science and Engineering. 1(4) (2008) 36-46 [5] Y.

Reference [1] J.K.
Journal of natural resources, 2010, 25(1): 112-120
Journal of world economy, 2000, 1(7): 65-74
The Review of Economics and Statistics, 2009, 91(1): 1-19
Nature, 2011, 470(7335): 479-485.

The WVP (g·mm·m-2·s-1·Pa-1) was calculated by Eq. 1
Table.1 The WVTR values of films Films Cellophane PET PET/PT WVTR(g·m-2·day-1) 24.525 5.225 5.668 It can be seen from Table 1 that the WVTR values of ordinary Cellophane was 24.525 g/m2·24h.
References [1] Carol A Phillips.
International Journal of Food and Science and Technology, 1996, 31:463-479
Critical Reviews in Food Science and Nutrition, 1989, 28(1):1-30

Especially, the multisplitting algorithm in Ref. [1] is the most popular at present.
Analysis of convergence Theorem 1.
Numerical examples Example 1.
Table 1 The results for model 1(the algorithm in the paper) P 1 2 4 8 T 963.9996 492.8244 251.7298 132.3971 S E 1.9746 0.9873 3.8658 0.9664 7.3501 0.9188 L 4114 4124 4126 4126 9.8879e-11 9.9845e-11 9.8893e-11 9.8908e-11 Table 2 The results for model 1(the multisplitting method) P 1 2 4 8 T 134.2484 69.4497 39.6882 25.3379 S 1.9330 3.3826 5.2983 E 0.9665 0.8456 0.6623 L 1053 1067 1067 1067 1.0002e-10 1.4842e-10 1.4842e-10 1.4842e-10 5.
Hill, Triangle mesh methods for the Neutron transport equation, Los Alamos Scientific Laboratory, Report LA-UR-73-479, 1973

Table 1.
CFL number of 1 was used and all solutions were run up to t=2.
This can also be observed from L2 norm in Table.1.
Hill:Triangular Mesh Methods for the Neutron Transport Equation,Tech.report LA-UR-73-479, Los Alamos ScientificLaboratory, ( 1973)
Comp. 46, 1(1986)

Under the change in population, urbanization and energy efficiency, this paper gives analysis model of energy demand change. 1.
Energy demand change model depends on a variety of changing factors （1） Energy demand change model depends on mutative GDP and energy intensity The relational model among energy demand, GDP and Energy demand: (3) stands for the ith energy intensity, stands for the ith energy demand, stands for GDP growth rate in the base case, stands for the GDP growth rate in the Jth condition, means the change rate for energy intensity in the base case, means the change rate for energy intensity in the Jth condition, meanwhile there are relationships among them in the following： = (1+) (4) = (1+) (5) = (1+) (6) means the change rate for GDP growth rate in Jth condition, means change rate for i’s energy intensity in the Jth condition, means change rate for i’s energy demand in the Jth condition.
References: [1] YU Chao, TAN Zhong-fu, WANG Lu-hua.
Electric Power, 2010, 43(10):1-5 [2] BOYD G A, HANSON D A, STERNER T.
Application of Statistics and Management, 2010，29 (3) : 473-479

Table 1 Measured Values for Creep Parameters of Fully Graded Concrete of Xiluodu Arch Dam Mark: C18035, Age：90d Duration for Recoverable Creep /d Recoverable Creep /10-6/MPa Fitted Parameters Duration for Unrecoverable Creep /d Unrecoverable Creep /10-6/MPa Fitted Parameters 1 2 A0 4.51443 84 6.8 D 28 2 2.2 A1 25.26697 90 7.1 m3 0.01148 3 2.4 A2 0.53611 120 7.5 4 2.6 B0 3.06571 180 8.3 5 2.8 B1 13 360 10.4 6 3 B2 0.91332 7 3.1 m1 0.01 14 3.8 m2 0.3 21 4.5 28 5 35 5.2 42 5.4 49 6 56 6.4 The compound exponential distribution for creep function of C18035 at age 90d is expressed in Eq. 1.
The numerically fitted curves are showed in Fig.1 and Fig.2
(1) Fig. 1 Fitted Curve for Recoverable Creep of C18035 at age 90d Fig. 2 Fitted Curve for Unrecoverable Creep of C18035 at age 90d Table 2 Measured Values for Creep Parameters of Fully Graded Concrete of Xiluodu Arch Dam Mark: C18035, Age：180d Duration for Recoverable Creep /d Recoverable Creep /10-6/MPa Fitted Parameters Duration for Unrecoverable Creep /d Unrecoverable Creep /10-6/MPa Fitted Parameters 1 0.6 A0 5 84 4 D 45.44927 2 1 A1 53 90 4.6 m3 0.0102 3 1.1 A2 1 120 5.1 4 1.3 B0 -1.30505 180 6 5 1.5 B1 35.87193 360 7.1 6 1.6 B2 0.49821 7 1.7 m1 0.008 14 2.1 m2 0.5 21 2.1 28 2.2 35 2.6 42 3 49 3.1 56 3.3 The compound exponential distribution for creep function of C18035 at age 180d is expressed in Eq. 2.
References [1] Y.
Zhang, Super Gravity Dam Generalized Damage Study, Advanced Materials Research. 479-481 (2012) 421-435 [4] Y.