Search results

Single Wafer Atomic Layer Deposition Reactor Design Tao Zhou1,a, Huawei Jiang2,b, Yue Xiao1, Yingbang Yao1, Bin Shan2, Rong Chen1,* 1 Department of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China 2 Department of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China aemail:timchou.hust@gmail.com, bemail:sunnysnow007@163.com * Corresponding author, email:rongchen@mail.hust.edu.cn Key words: ALD, Reactor design, Gas delivery, Heating system, FEM, ANSYS simulation Abstract: Atomic layer deposition (ALD) is a very attractive ultra-thin film deposition technique.
Stuyven, et al., Journal of Crystal Growth 234, 690-698 (2002)
Ritala, et al., Science 288, 319-321 (2000)
Puurunen, Journal of Applied Physics 97 (2005)
George, Journal of Physical Chemistry A 114, 1281-1289 (2010).

A New Upper Bound Solution For a Hollow Cylinder Subject to Compression and Twist, Journal of Mechanical Engineering Science, Vol. 218(2004), pp. 369-375 [2] C.C.
Huang:, Study on the Twist Compression Forming of Cylinder Based on the Upper Bound and Slab Method, Journal of Materials Processing Technology, Vol. 174(2006), pp. 266-271 [4] J.R.
Tzou,: Study on Compression of a Rotating Disk Considering Hybrid Friction, Journal of Materials Processing Technology, Vol. 125-126(2002), pp. 421-426 [6] M.N.
Tzou:, Two analytical models of double-layer clad sheet compression forming based on the upper bound and the slab methods, Journal of Materials Processing Technology, Vol. 140(2003), pp. 604-609 [8] Y.H.
Lu:, FEM Analysis of Cylinder Twist Compression Deformation Regularity, Journal of Materials Processing Technology, Vol. 69(1997), pp. 148-151

Kaewkhao1,2,c 1Center of Excellence in Glass Technology and Materials Science (CEGM), Nakhon Pathom Rajabhat University, 73000, Thailand 2Science Program, Faculty of Science and Technology, Nakhon Pathom Rajabhat University, 73000, Thailand akboonin@hotmail.com, bpyasaka@hotmail.com, cmink110@hotmail.com Keywords: Zinc barium tellurite glass, Physical property, luminescence property Abstract.
Resulting in a wide range of applications, such as optical materials used in laser technology or fast-ions conducting solid electrolytes [3-4].
Revel, Materials Chemistry and Physics, Vol. 124, (2010), 732–737
Zhang, Optical Materials, Vol. 32, (2009), 402–405
Qiu, Optical Materials, Vol. 31, (2009), 1506–1512

Butanone 1,2-propanediol ketal was synthesized by butanone and 1,2-propanediol as raw materials and sulfamic acid as catalyst.
The effects of the mole ratio of raw materials agent, the dosage of the water-carrying agent and catalyst, reaction time on the product yield were discussed separately.
Journal of Liaoning Teachers College [J].Vol.9(4) 2007(12):28~30.
[2] Baolan Lv, Haixiao Zhang，Jinshui Yang.Journal of Hubei Normal University (Natural Science) [J].
Advanced Materials Research [J].Vols. 550-553:400~403

To coordinate the relationship between urbanization and the environment, the future should focus on investment in science and Technology and carry out reasonable city planning and layout in the progress of urbanization.
According to statistics, at present China’s food self-sufficiency rate only 80%, edible oil more than 80% dependent on imported raw materials processing.
Journal of Hunan University of Science and Technology.
Environmental Science and technology.p.75-77
Social Sciences, Vol.3(2005), p.186-188.

Forming Process of Composites Materials Composite molding process can be divided into the traditional craft and modern technology, the traditional mature technique, has been widely used in the manufacturing of composite component, with the development of science and technology, many advanced emerging technology have been developed, the formation of the rapid development of modern technology [1].
(2) The autoclave moulding technology: The autoclave moulding technology is the main method for forming of advanced composite component, glue material and laminated block and some other auxiliary materials used to glue system vacuum components, and placed in the hot pot, heating and pressing, curing molding parts finished.
(4) The RTM technology principle and technology process In recent years, in order to expand the scope of application of composite materials, composite materials research focus gradually shifted to the development of high performance low cost composite technology, so RTM as a composite of new manufacturing technology emerge as the times require Fig.5 Process flowchart of RTM The design of RTM mold structure based on INVAR steel Taking automotive interior parts of a carbon fiber composite material as an example, according to the design model of a part, as shown in figure 6.
Three-dimensional measurement technologies for advanced manufacturing[J].Fujitsu Scientific and Technical Journal, 2007, 43(1):76-86 [2] Azernikov S.
Application of multi point technology in the manufacturing of aircraft sheet metal parts[J].Journal of Plasticity Engineering, 2008, 15 (2): 109-114

After setting the corresponding materials parameters, set boundary conditions to that the axle constraints the movement and rotation of the inside surface of the gear in each direction.Divde the finite element mesh automatically according to the default mode.Because the mode is determined by the the inherent characteristics of the system and has nothing to do with the load,there is no need to set the boundary conditions of load.
References [1] S Vijayarangan, N Ganesan: Journal of Sound and Vibration.
[3] A Kahraman, A A Kharazi, M Umrani: Journal of Sound and Vibration Vol.262(2003), p.752-768
[4] A Al-shyyab, A Kahraman: Journal of Sound and Vibration Vol.284(2005), p.151-172
[7] Ah-Der Lin: International Journal of Mechanical Sciences Vol.50(2008), p.205-213

Acknowledgment This paper is supported by state key science and technology special projects for advanced CNC machine tools and basal manufacturing equipments (2012ZX04011021).
References [1] Jianguo Yang, Zhiming Wang，Guoqiang Wang, Genbao Zhang, Likelihood Ratio Test Interval Estimation of Reliability Indices for Numerical Control Machine Tools, Journal of Mechanical Engineering. 48 (2012) 9-15
[2] Xintao Xia, Yongzhi Xu, Yinping Jin, Yantao, Shang, Long Chen, Assessment of optimum confidence interval of reliability with three-parameter Weibull distribution using bootstrap weighted-norm method, Journal of Aerospace Power. 28 (2013) 481-488
[3] Moucun Yang, Hong Nie, Advanced Algorithm for Maximum Likelihood Estimation of Three Parameter Weibull Distribution, Journal of Nanjing University of Aeronautics &Astronautics. 39 (2007) 22-25
[5] Murat Tiryakioğlu, David Hudak, On estimating Weibull modulus by the linear regression method, Journal of Materials Science. 42 (2007) 10173-10179.

Experimental Section 2.1 Material The solid materials needed in the experiment are IGU-15 absorption tablets, nitroguanidine (NGU), and TiO2(ZA-100) from Aladdin industries inc； We also used anhydrous ethanol, for analytical purity, from Nanjing chemical reagent co.
Journal of Ballistics, 1993(4): 78-94
Preliminary Study of Multiperforated Granular End-surface-coated Propellant by Epoxy Resin Composite Materials[J].
Chinese Journal of Energetic Materials, 2012, 20(2): 161-166
Energetic Materials, 1996(1): 10-17.

India Journal of Engineering & Materials Sciences, 1998, 5(5):271-277
Journal of Spacecraft And Rockets. 2009, 46(3):492-50
Journal of Propulsion Technology,2005,26(5):448-451
[13] China Aeronautical Materials Handbook Committee.
China Aeronautical Materials Handbook[M].