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Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe Lan Zhang1,a, Yang Ju1,b, Atsushi Hosoi1,c and Akifumi Fujimoto1,d 1Department of Mechanical Science and Engineering, Nagoya University Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan azhang.lan@d.mbox.nagoya-u.ac.jp, bju@mech.nagoya-u.ac.jp, chosoi@mech.nagoya-u.ac.jp, dfujimoto.akifumi@c.mbox.nagoya-u.ac.jp Keywords: Nanotechnology, Microwave, Atomic force microscope, Electrical properties.
Abstract: To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated.
In previous research, for obtaining the optimal design of M-AFM probe, many influencing factors have been studied [2-4].
By analyzing the reflected microwave signal, the electrical properties of different materials can be obtained.
It is noted that such difference can be corrected by calibration, therefore it will not affect the evaluation of electrical properties of materials.

The CMP process is dominated by the phenomenon of wear in which the removal rate of materials is determined by the nature of the chemical and mechanical properties of the thin film on the wafer.
Also, the wear of material is greatly affected by the surface properties of the mating surface, that is, the polishing pad.
The surface topography and mechanical properties of the polishing pad combined with the tribological condition of the CMP process is therefore the key role in the mechanism of material removal in CMP.
Among the properties of the pad, the surface roughness is known as the dominant factor that determines the removal rate of the thin film [3].
Besides the friction force, there is another factor that affects the uniformity of the removal rate.

The thermophysical properties have been obtained from Pamitran et al. [7].
Eq. 6 is being coupled with the pressure drop in the current homogeneous model because it represents the two-phase quality in terms of its properties.
Table 1 lists the properties of ammonia used in this study and other parameters associated with the properties obtained.
Table 1: Properties of ammonia used in the study [7].
Moody, Friction factors for pipe flows, Trans.

The mechanical properties were performed at the same apparatus and followed standard of EN 310.
This disparity derived from the difference structure, previous study [5] showed that surface layer, layout of each layer, especially the middle layer and the bonding strength were all affecting mechanical strength.
Combined with TABLEI it can be inferred that water immersion time and temperature, freezing process, drying temperature and time were the main factors influencing the strength.
When exposed to outdoor aging, sunlight was another important factor degrading the panels which showed apparent discoloration, but compared with temperature and water, sunlight affected more on surface layer and little on mechanical properties, so the study ignored the influence of sunlight [10].
Kokta，”The Effect of Aging Conditions on the Mechanical Properties of Wood Fiber-Polystyrene Composites: I.

Peng Cai et. al. [9] studied the effect of mullite content on the mechanical, thermal and tribological properties of frictional material.
Therefore, understanding the effect of different factors on material properties is critical and could increase the ability to design and control the production process to achieve required property.
Hence, it is extremely useful to study the effect of different variables on tribology, physical and mechanical properties.
Rimdusit, Thermal and mechanical properties enhancement obtained in highly filled alumina-polybenzoxazine composites, Polym Compos 35 (2014) 2269–2279
Wang, Effect of resins on thermal, mechanical and tribological properties of friction materials, Tribology International 87 (2015) 1-10

Test methods of varied properties Damping property Damping property was measured by a test system of cantilever beam [5].
Mechanical properties of test Tensile-strength, stress at definite elongation 100% and maximum elongation were measured according to the standard of GB /T 528—1998[6].
There were four main factors that could affect the property, namely EPDM/PVC (A), Glass fiber (B), HAF (carbon black) (C), CPE (D) from scientific or technical literature.
The purpose was to obtain the optimum formula and main influence factors.
The results were showed in Table. 4 Table. 4 Range analysis of mechanical properties Conclusion By the orthogonal experiments, the order of effect factors and optimum formula were acquired and the reliability of results was verified based on the analysis of data.

Influence of Thermo-mechanical Heat Treatment on the Thermoelectric Properties of Ag added Bi1Sb3Te6 Compounds W.K.
A highly anisotropic hexagonal crystal structure which has weak van der walls bonding along the c-axis is the reason of low mechanical properties - especially the brittleness caused by cleavage fracture.
Therefore, it is need to find the process which can produce fine grained and highly oriented structure without loss of mechanical properties.
Therefore, it is proposed that Ag added Bi1Sb3Te6 thermoelectric materials produced by hot-extrusion may provide improved thermoelectric performance without loss of mechanical properties.
The intensity change of (110) plane which is perpendicular to the basal plane could affect the thermoelectric properties.

Studies performed on PLA towards biodegradable polymers identify governing parameters affecting the material's fatigue life and mechanical performance.
Such properties result from the interaction of several factors, including base polymer properties, reinforcement or additive incorporation, processing conditions, and environmental exposure.
Temperature is one of the factors that could significantly affect the behavior of biodegradable polymers with respect to viscoelasticity, especially near glass transition temperatures (Tgs).
Not only have these nanoparticles been shown to improve the mechanical properties, but they also have been shown to improve biodegradability because of the presence of easily hydrolized ester groups in the copolymer backbone [28]. 7.2 Factors Affecting Biodegradation Rate In different environments, several factors govern the biodegradation rate of PLA, PHB, and their composites.
Many important factors should be taken into consideration while developing antimicrobial biodegradable polymers.

Basis on meeting the mechanical properties, the porosity was used as the index for the optimization of the porous structure of the artificial bone.
According to the literature [5], pore size, porosity and pore connectivity were the decisive factors of affecting the growth pattern and the number of bone in the implantation into the human body.
And then the elastic modulus had become an important indicator to measure the mechanical properties of artificial bone.
On the basis of meeting mechanical properties, the ideal artificial bone scaffold should guarantee high porosity and good 3D connectivity.
So the requirements of mechanical properties were satisfied

To obtain desirable mechanical properties, therefore, several processing routes for preparing Zr(Y,Ce)O2 TZP material in the Y2O3-CeO2-ZrO2 system have been reported in the literature [3].
The effects of 12 mol.% CeO2-ZrO2 addition on densification, microstructure and mechanical properties of 3 mol.% Y2O3-ZrO2 were discussed.
Therefore, the dependence of grain size on mechanical properties becomes to be different in accordance with which of them acting predominately.
This means that the strength is sensitive on not only grain size but other factors such as composition, density and inner defect.
The sintered grain sizes and mechanical properties were governed by the batch composition of two component materials.