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Study on the Surface Characteristics of Polishing Pad Used in Chemical Mechanical Polishing Hong Gao1, a and Jianxiu Su2, b 1 Guizhou University, Guizhou, Guiyang 550025, China 2 Henan Institute of Science and Technology, Xinxiang 453003, China a deutschgao2009@163.com, bjxsu2008@people.com.cn Keywords: CMP, Material removal mechanism, Polymer materials, Polishing pad, Surface characteristics Abstract.
The polishing pad used in the manufacture of integrated circuits is mainly polymer materials and the main component is the polyurethane foam.
Kang, et al : Materials Science Forum, Vols. 471-472 (2004), p. 26-31 [3] J.X.
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Meade, et al: Journal of Tribology, Vol. 122 (2000), p. 539-543 [8] G.H.

The results allow conclusions concerning materials damage.
Hoffelner, Oxide dispersion strengthened steel irradiation with helium ions, Journal of Nuclear Materials 352 (1-3) (2006) 57-61
Hoffelner, Irradiation creep and precipitation in a ferritic ods steel under helium implantation, Journal of Nuclear Materials 373 (1-3) (2008), 22-27
Victoria,Assessment of the constitutive properties from small ball punch test: experiment and modeling, Journal of Nuclear Materials, 335 (3) 1 (2004) 366-378
Nix, Sample Dimensions Influence Strength and Crystal Plasticity, Science 13, Vol. 305. no. 5686 (2004) 986 - 989

Anomalous Diffusion during Water Absorption in Porous Building Materials - Experimental Evidence N.M.M.
The role of water in the mechanism of deterioration of porous building materials has been recognized for a long time.
Figure 2 shows the mass variation observed in two different materials.
Crank: The Mathematics of Diffusion (Oxford Science, New York 1975)
Lavallée: Journal of Physics D: Applied Physics Vol. 37 (2004), p.

Experimental Materials and Experimental Method.
Al-Qadisiyah Journal for Engineering Sciences, 8(2), 137-146
Graphene-Based Composites as Cathode Materials for Lithium Ion Batteries.
Journal of Materials Science, 48(18), 6223–6232. https://doi.org/10.1007/s10853-013-7420-8 [11] Kuilla, T., Bhadra, S., Yao, D., Kim, N.
Baghdad Science Journal, 9(2), 330-334

However, its shortage is that the application of energy storage balls increases heat exchange area of phase change materials, which decreases simultaneously the heat transfer performance of phase change materials.
Acknowledgements This work was financially supported by China National Natural Science Foundation (51066001), Yunnan Province Natural Science Foundation (2008CD093) and the Talent Cultivation Foundation of Kunming University of Science and Technology (2010-010).
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In this experiment combinatorial friction materials research is conducted.
Raw materials used are screened by two criteria:1, select those raw materials which have good wear resistance when they combine with group raw materials; 2, select those raw materials that have the function of reducing brake noise。
Comprehensive index of raw materials is obtained by the relational grade analysis.
Combination method sieving original material 1.1 combination method sieving original material principle Combination method is based on combinatorial chemistry and composition of the material principle of chip technology, through various combinations of raw materials to the evaluation and selection and to understand the interaction between raw materials and the combination of law, to find synergy with the combination of the laws of the raw materials to achieve a reasonable choice of raw materials aim.
Clem: submitted to Journal of Materials Research (2003) [6] P.G.

Shape-stabilized phase change material are composite energy storage materials composed of phase change materials and polymeric support materials, due to slight packaging and supporting function of polymeric cystic materials, as the core materials, the solid-liquid phase change materials don’t outflow during phase changes and the whole composite material can maintain its original shape and a certain intensity after core materials melt.
American Florida University of Science and Technology has used mixture of fatty acids and short-chain acids, mixture of methyl ester and short-chain acids as phase change materials, respectively, uses the mortar board as the base materials, to prepare phase change wallboard by immersion method.
Research is being carried out gradually, such as, the choice of the phase change materials, thermal analysis, phase change materials combined with building materials and the actual use of phase change wall .
Journal of materials in civil engineering: 1998:99 [6] D Feldman, D Banu, D Hawes.
Latent heat storage in building materials[J].

Manna, Glass fibers/SiCp reinforced epoxy composites: Effect of environmental conditions, Journal of Composite Materials. (2017) DOI: 10.1177/0021998317723448
Fascio, Machining of non-conducting materials using electrochemical discharge phenomenon - an overview, International Journal of Machine Tools and Manufacture. 45 (2005) 1095-1108
Fang, Application of genetic algorithm-based fuzzy logic control in wire transport system of wire-EDM machine, Journal of Materials Processing Technology, 205 (2008) 128-137
Manna, A Study on Input Parameters Affecting Material Removal Rate and Surface Roughness in Electrochemical Discharge Machining Process, International Journal of Advance Research in Science and Technology, 3(12) (2014) 400-405
Sorkhel, Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic material, Journal of Materials Processing Technology, 95 (1999) 145-154

NDT was first used for military purpose but nowadays it is used widely in many fields such as composite materials, medical purposes, fire safety, laser welding, food safety and quality and characterization of materials.
It is used for condition monitoring of composite materials and concrete and to check alignment of parts[1].
Giorleo, Luca Journal of Materials Processing Technology 155-156, (2004), 1132-1137
Journal of Nuclear Materials 367-370(Part 2), (2007), 1492-1496
Journal of Applied Polymer Science 88: (2003). 278–286

And the usages of some corresponding methods in manufacturing Carbon-Carbon materials as ablation resistant materials are shown in this paper too.
The processes of C/C composites as ablation resistant materials can provide references for weaponry materials in the further development.
Chawla, Composite Materials Science and Engineering, 2nd edition, Springer-Verlag, NY, 1998, pp. 252-276
Don and M.A.Wright, Carbon-Carbon Matrix Materials, Carbon-Carbon Materials and Composites, 1993, pp.197
Xiong, et al, Preparation and Microstructure of C/C-SiC Composites Fabricated by Warm Compressed-in situ Reacted Process, Journal of Central South University (Science and Technology), 2011, pp. 1588-1592