Description: Collection of selected, peer reviewed papers from the Conference on Physical-Technical Problems of Nuclear Science, Energy Generation and Power Industry, (PTPAI-2014), June 5-7, 2014, Tomsk, Russia.
The 151 papers are grouped as follows:
Chapter 1: Materials Science and Technologies;
Chapter 2: Plasma, Microwave, Ion, Electron and Isotope Technologies;
Chapter 3: Nuclear Engineering and Fuel Cycles;
Chapter 4: Radiation Technologies in Medicine;
Chapter 5: Computation, Automation, Information Technologies and Safety Systems in Nuclear Industry

Plasma Properties, Deposition and Etching

Edited by: J. J. Pouch and S. A. Alterovitz

Online since: October 1993

Description: Containing 42 invited papers, this fine book covers a broad range of subjects on plasmas and applications.
In the first section, plasma properties and methods used to characterize the plasma are addressed. Many of these papers also cover deposition or etching of particular materials. The second part focuses on the application of various plasma techniques used to deposit thin films, and on the resulting film properties. Finally, the application of plasma etching to the fabrication of silicon-based circuits, plasma etching of III-V compound semiconductors and other processing applications are discussed in the third and last section.