Description: This proceedings volume contains the proceedings of all presentations of the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2023. The subject matter of the UCPSS symposium is ultra-clean processing, isotropic selective etching and surface preparation technology in all steps of the fabrication of micro-and nano-electronic integrated circuits. This volume describes the recent progress in the field of ultra clean surfaces, surface cleaning and preparation for the production of micro- and nano-electronic integrated circuits and related subjects. This involves a wide variety of surfaces of mixed composition and with nano-topography. The goal of the processes is to obtain nano precise etching and cleaning resulting in ultra clean surfaces with a very high degree of perfection, i.e. with minimal amounts of residues or defects. This comprises different surface and cleaning steps throughout the entire device manufacturing process.

Ultra Clean Processing of Semiconductor Surfaces XV

Edited by: Dr. Paul W. Mertens, Kurt Wostyn, Marc Meuris and Marc Heyns

Online since: February 2021

Description: This proceedings volume describes the recent progress in the field of ultra-clean surfaces and surface cleaning and preparation for the production of micro- and nanoelectronic integrated circuits and related subjects. This involves a wide variety of surfaces of mixed composition and with nano-topography with an aspect ratio of lateral dimension/vertical dimension on the order of 1/10. The goal of the processes is to obtain nano precise etching and cleaning, resulting in ultra-clean surfaces with very few residues or defects. This comprises different surface and cleaning steps throughout the entire device manufacturing process.

Metallurgy Technology and Materials III

Edited by: K.B.R. Varma

Online since: June 2014

Description: Collection of selected, peer reviewed papers from the 2014 3rd International Conference on Metallurgy Technology and Materials (ICMTM2014), April 25-26, 2014, Kunming, China.
The 58 papers are grouped as follows:
Chapter 1: Advanced Materials Science,
Chapter 2: Materials Processing Technology,
Chapter 3: Metallurgical and Mining Engineering,
Chapter 4: Applied Mechanics, Mechanical Engineering and Information Technologies