Gettering and Defect Engineering in Semiconductor Technology III

Gettering and Defect Engineering in Semiconductor Technology III

Description:

Solid State Phenomena Vols. 6-7

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Info:

Editors:
M. Kittler
THEMA:
TGM
BISAC:
TEC021000
Details:
Proceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989
Pages:
620
Year:
1989
ISBN-13:
9783908044048
ISBN-13 (CD):
9783038599609
ISBN-13 (eBook):
9783035706444
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