Gettering and Defect Engineering in Semiconductor Technology V

Gettering and Defect Engineering in Semiconductor Technology V

Subtitle:

GADEST '93

Description:

Solid State Phenomena Vols. 32-33

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Info:

Editors:
H.G. Grimmeiss, M. Kittler and H. Richter
THEMA:
TDP, TGM, TJ
BISAC:
TEC008000, TEC020000, TEC021000
Details:
Proceedings of the 5th International Autumn Meeting, Chossewitz, Frankfurt (Oder), Germany, October 09-14, 1993
Pages:
650
Year:
1993
ISBN-13 (softcover):
9783908450009
ISBN-13 (CD):
9783038599661
ISBN-13 (eBook):
9783035706505
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