Volume is indexed by Thomson Reuters CPCI-S (WoS).
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology.. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology.

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eBook:

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ToC:

Table of contents

Editors:

Xiaohao Wang

DOI:

https://doi.org/10.4028/b-Z5I7hs

THEMA:

MB, PDT

BISAC:

TEC021000

Keywords:

Antiferroelectric Thick Film, Closed-Loop Control, Finite Element Analysis (FEA), Frequency Modulation, Light Guide Plate, MEMS, MEMS Accelerometer, Micro-Accelerometer, Micro-Fluidics, Microstructure, Modulator, Resonance Frequency, Sigma-Delta, Silicon, Simulation, SNR, Stability, Thermal Property, Transmittance, Uniformity

Details:

Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China

Pages:

470

Year:

2012

ISBN-13 (softcover):

9783037853641

ISBN-13 (CD):

9783037951873

ISBN-13 (eBook):

9783038136897

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Review from Ringgold Inc., ProtoView: The 81 papers cover the micro/nano transducer/actuator/robot, microfluidic devices and systems, micro/nano fabrication and measurement technologies, microfluidics and nano fluids, nano material research/nanotube/nanowire devices, MEMS/NENS and applications, nanometer biological/nano medicine, and packaging technology. Among specific topics are micro-machined electrochemical seismic sensors with interdigital electrodes, a simple method for depositing DNA on the mica, an analytical model of a fluxgate system, analyzing broken wires during gold wire bonding process, and an integrated micro-sensor system to gather meteorological information.