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This second book on the subject of MEMS covers contemporary topics of importance to science, engineering and the technology of materials.

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eBook:

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ToC:

Table of contents

Editors:

Selin Teo, A. Q. Liu, H. Li and B. Tarik

DOI:

https://doi.org/10.4028/b-Hl5KN8

THEMA:

TGM

BISAC:

SCI077000

Keywords:

Active Flow Control, Bio-MEMS, Biosensor, Gold Nanoparticles (GNP), Lab-on-a-Chip, Lithography, Micro-Channel, Micro-Electromechanical System (MEMS), Micro-Fluidics, Micro-Hole, Mixing, NEMS, PDMS (Polydimethylsiloxane), Photonics, Photothermal Imaging (PTI), Piezoelectric Actuator, Polymer, Simulation, Synthetic Jet Flow, Tunable Laser

Details:

Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, (ICMAT 2009), Symposium L, 28 June – 3 July, Singapore

Pages:

334

Year:

2009

ISBN-13 (softcover):

9780878493210

ISBN-13 (CD):

9783908454557

ISBN-13 (eBook):

9783038133001

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Review from Ringgold Inc., ProtoView: Selected papers from a July 2009 symposium report on recent work in technology and devices of nanoelectromechanical systems (NEMS) and microelectromechanical systems (MEMS). Papers describe not only applications that involve MEMS design, but also modeling, fabrication processes, lab-on-a-chip, and biophotonic devices for applications such as protein and cell sorting. Material is in sections on modeling and simulation, photonics, microfluidics, biosensors, NEMS/MEMS for bio-applications, MEMS sensor and energy harvesting, and nano-fabrication. Some specific topics detailed include design and fabrication of novel compliant electrostatically actuated microvalves, enabling low temperature copper bonding with an organic monolayer, a photonic MEMS polarization switch, and photothermal techniques for materials characterization and live cell monitoring. B&w images are included.