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The proceedings of this Symposium cover a broad range of areas concerned with thin film research and applications. Particular emphasis is placed on the properties of thin films and their final application in modern technology.

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eBook:

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ToC:

Table of contents

Editors:

Horst Hoffmann

DOI:

https://doi.org/10.4028/b-w643Uj

THEMA:

TGM

BISAC:

TEC021000

Keywords:

Chalcogenide Glass, Coating, Color Detector, DC Magnetron Sputtering, Deposition Process, Diamond, Gas Plasma Source, Immunosensors, Ions, Multilayer, Nanostructure, Nitriding, Optical Property, Plasma Source, Reactive Sputtering, Residual Stress, Sputtering, Thin Film, Titanium (Ti), Vacuum-Arc

Details:

Proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998

Pages:

576

Year:

1998

ISBN-13:

9780878498154

ISBN-13 (CD):

9783038598473

ISBN-13 (eBook):

9783035705317

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