Trends in Ion Implantation

Trends in Ion Implantation

Description:

The book reviews and discusses some important new aspects of the field of ion implantation.

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978-0-87849-644-0
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Info:

Editors:
Marc van Rossum
THEMA:
TGM
BISAC:
TEC021000
Pages:
208
Year:
1992
ISBN-13:
9780878496440
ISBN-13 (CD):
9783038596233
ISBN-13 (eBook):
9783035703085
Permissions CCC:
Permissions PLS:
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