Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Yun Hee Lee; Yong Hak Huh; Ju Young Kim; Seung Hoon Nahm; Jae Il Jang; Dong Il Kwon

doi:10.4028/www.scientific.net/KEM.326-328.215

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 326-328Yield Property Characterization for Au and TiN...

Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Abstract:

We tried to apply the nanoindentation technique to yield strength characterization by modifying a previous research. Although the yield strength determining technique developed by Kramer et al. has been successfully demonstrated for large scale indentations on bulky metals, its applicability is still doubtful to nanoscale indentations on thin films with severe roughness, anisotropy, and interfacial constraint. In order to overcome these problems, we combined the nanoindentation technique with a three-dimensional indent visualization technique in this study. Nanoindentation tests were performed for Au and TiN thin films and their corresponding indents were scanned by using an atomic force microscope. From the three-dimensional pile-up morphology, a circular pile-up boundary was measured and input into the yield strength formulation as an effective yielded zone radius. The yield strengths calculated were directly compared with those from the microtensile test.

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Periodical:

Key Engineering Materials (Volumes 326-328)

Pages:

215-218

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.326-328.215

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Online since:

December 2006

Authors:

Yun Hee Lee, Yong Hak Huh, Ju Young Kim, Seung Hoon Nahm, Jae Il Jang, Dong Il Kwon

Keywords:

3D Indent Visualization, Nanoindentation, Thin Film, Yield Strength

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