Paper Titles
Polytype Control in 6H-SiC Grown via Sublimation Method
p.95
Characterization of Bulk <111> 3C-SiC Single Crystals Grown on 4H-SiC by the CF-PVT Method
p.99
Hybrid Physical-Chemical Vapor Transport Growth of SiC Bulk Crystals
p.103
SiC HTCVD Simulation Modified by Sublimation Etching
p.107
Gas Fed Top-Seeded Solution Growth of Silicon Carbide
p.111
Growth of SiC Single Crystal from Si-C-(Co, Fe) Ternary Solution
p.115
Solution Growth of SiC Crystal with High Growth Rate Using Accelerated Crucible Rotation Technique
p.119
Growth of Cubic Silicon Carbide Crystals from Solution
p.123
Recent Progress of SiC Hot-Wall Epitaxy and Its Modeling
p.129

Gas Fed Top-Seeded Solution Growth of Silicon Carbide

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Abstract:

The growth of SiC crystals or epilayers from the liquid phase has already been reported for many years. Even if the resulting material can be of very high structural quality and the possibility to close micropipes was demonstrated, handling the liquid phase still is a challenge. Moreover, it is highly difficult to stabilize the C dissolution front and then to stabilize the growth front over a long growth time. Based on the Vapour-Liquid-Solid mechanism, we present a new configuration for the growth of SiC single crystal which should allow first to simplify the liquid handling at high temperature and second to precisely control the crystal growth front. The process consists in a modified top seeded solution growth method, in which the liquid is held under electromagnetic levitation and fed from the gas phase. In a Co-Si solution fed from a propane flow at 1350°C, thick epitaxial layers of 4H-SiC have been grown at 28 0m/h. The potentiality of this new process will be discussed in the paper.

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Silicon Carbide and Related Materials 2005 View Preview

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Periodical:

Materials Science Forum (Volumes 527-529)

Pages:

111-114

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.527-529.111

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Online since:

October 2006

Authors:

Didier Chaussende, Michel Pons, Roland Madar

Keywords:

Bulk Growth, Liquid Phase, VLS

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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