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Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions

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Abstract:

The optimized terrace formation of SrTiO3 (111) substrates was investigated in various etching conditions. HCl-HNO3 solution was unstable for etching the SrTiO3 (111) substrates with different surface states. It was found that etching in buffered HF (BOE) solution for 2min provides a stable etching condition for SrTiO3 (111) substrates with various surface states and etching process is an important factor for the formation of step-terrace structures. The surface degradation of SrTiO3 (111) in normal atmosphere was also observed and it is considered that the humidity is a important factor for the surface degradation.

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Periodical:

Advanced Materials Research (Volumes 26-28)

Pages:

1203-1206

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.26-28.1203

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Online since:

October 2007

Authors:

Ju Hyung Suh, Yong Seok Lee, Chan Gyung Park

Keywords:

Atomic Force Microscope (AFM), SrTiO3 (111) Substrate, Surface Termination, Terrace

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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