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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53Carbon (sp3) Film Growth from Mass Selected Ion...

Carbon (sp³) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model

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Properties and Characterization of Amorphous Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Pages:

237-290

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53.237

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Online since:

January 1990

Authors:

Y. Lifshitz, S.R. Kasi, J.W. Rabalais

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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