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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53Substrate Sputter Erosion Effects during a-C:H...

Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge

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Properties and Characterization of Amorphous Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Pages:

291-300

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53.291

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Online since:

January 1990

Authors:

S. Berg, B. Gelin

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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