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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Optical Beam Induced Current Analysis of...

Optical Beam Induced Current Analysis of High-Voltage 4H-SiC Schottky Rectifiers

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1195-1198

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1195

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Online since:

May 2000

Authors:

Takashi Tsuji, R. Asai, Katsunori Ueno, Shinji Ogino

Keywords:

KOH Etching, Leakage Current, OBIC Images, Schottky Rectifiers

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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