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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Full Si Wafer Conversion into Bulk 3C-SiC

Full Si Wafer Conversion into Bulk 3C-SiC

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

147-150

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.147

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Online since:

April 2002

Authors:

André Leycuras, Olivier Tottereau, Patrice Vicente, L.A. Falkovsky, P. Girard, Jean Camassel

Keywords:

Bulk 3C-SiC

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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