Dynamic of Laser Ablation in SiC

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Materials Science Forum (Volumes 457-460)

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411-414

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June 2004

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1002/pssa.200306281

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[4] K.J. Laidler, J.M. Meiser: Physical Chemistry (Houghton Mifflin Company, Boston-New York 1999). Fig. 6. Section analysis and morphology of the 6H-SiC surface irradiated by a) 10 laser pulses, b) 15 laser pulses, c) 60 laser pulses b c a Fig. 5. Friction Force Microscope measurements of the 6H-SiC surface after irradiation by N2 laser.

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