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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Self-Limiting Formation and Optical Properties of...

Self-Limiting Formation and Optical Properties of Hemispherical Grains of Microcrystalline Silicon on an Amorphous Silicon Film Surface

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

269-274

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.269

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Online since:

June 2003

Authors:

Housei Akazawa

Keywords:

Amorphous Silicon, Microcrystalline Silicon, Nucleation, Self-Assembly, Spectroscopic Ellipsometry (SE)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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