A Comparative Analysis of Structural Defect Formation in Si<sup>+</sup> Implanted and then Plasma Hydrogenated and in H<sup>+</sup> Implanted Crystalline Silicon

Materials Science & Technology

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A Comparative Analysis of Structural Defect Formation in Si⁺ Implanted and then Plasma Hydrogenated and in H⁺ Implanted Crystalline Silicon

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