Carrier Recombination Activities and Structural Properties of Small-Angle Boundaries in Multicrystalline Silicon

Article Preview

Abstract:

The carrier recombination activities of small angle (SA) grain boundaries (GBs) in multicrystalline Si (mc-Si) were systematically investigated by electron-beam-induced current (EBIC). At 300 K, general SA-GBs with tilt angle from 0° to 10° showed weak EBIC contrast (0- 10%) with the maximum appeared at 2°. At low temperature (100 K), all the SA-GBs showed strong EBIC contrast despite the tilt angle. Possible explanations for the variation of the EBIC contrast were discussed in terms of boundary dislocations.

You might also be interested in these eBooks

Info:

Periodical:

Solid State Phenomena (Volumes 131-133)

Pages:

9-14

Citation:

Online since:

October 2007

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] A. Bary and G. Nouet: J. Appl. Phys. 63 (1988), p.435.

Google Scholar

[2] R. Rizk, A. Ihlal and X. Pot-tier: J. Appl. Phys. 77 (1995), p.1875.

Google Scholar

[3] M. Kittler, W. Seifert, M. Stemmer and J. Palm: J. Appl. Phys. 77 (1995), p.3725.

Google Scholar

[4] J. Chen, T. Sekiguchi, D. Yang, F. Yin, K. Kido and S. Tsurekawa: J. Appl. Phys. 96 (2004), p.5490.

Google Scholar

[5] J. Chen, D. Yang, Z. Xi and T. Sekiguchi: J. Appl. Phys. 97 (2005), p.033701.

Google Scholar

[6] J. Chen, T. Sekiguchi, R. Xie, P. Ahmet, T. Chikyo, D. Yang, S. Ito and F. Yin: Scripta Materialia 52 (2005), p.1211.

DOI: 10.1016/j.scriptamat.2005.03.010

Google Scholar

[7] W. Seifert, G. Morgenstern and M. Kittler: Semicond. Sci. Technol. 8 (1993), p.1687.

Google Scholar

[8] S. Hamada, K. Kawahara, S. Tsurekawa, T. Watanabe and T. Sekiguchi: Mat. Res. Soc. Symp. Proc. 86 (2000), p.163.

Google Scholar

[9] H. J. Leamy: J. Appl. Phys. 53 (1982), p. R51.

Google Scholar

[10] V. Randle: The Measurement of Grain Boundaries Geometry (Institute of Physics Publishing, Bristol and Philadelphia 1993).

Google Scholar

[11] S. Nara, T. Sekiguchi and J. Chen: Eur. Phys. J. Appl. Phys. 27 (2004), p.389.

Google Scholar

[12] T. Sekiguchi and K. Sumino: Rev. Sci. Instrum. 66 (1995), p.4277.

Google Scholar

[13] W. Shockley and W. T. Read: Phys. Rev. 87 (1952), p.835.

Google Scholar

[14] W. T. Read WT and W. Shockley: Phys. Rev. 78 (1950), p.275.

Google Scholar

[15] V. Kveder, M. Kittler and W. Schröter: Phys. Rev. 63 (2001), p.115208.

Google Scholar