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Hydrogen Gas Sensors using 3C-SiC/Si Epitaxial Layers

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

1499-1502

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.1499

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Online since:

June 2004

Authors:

T.J. Fawcett, J.T. Wolan, Rachael L. Myers-Ward, J. Walker, Stephen E. Saddow

Keywords:

3C-SiC, Gas Sensor, Hydrogen

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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