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Articles by author: Bernd Tillack

• Atomically Controlled Technology for Future Si-Based Devices
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p607)
• Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates
  Published in: Gettering and Defect Engineering in Semiconductor Technology (p617)
• Defect Control in Thick SOI-Films Produced by Zone Melting Recrystallization
  Published in: Gettering and Defect Engineering in Semiconductor Technology (p579)
• Impact of Defects on the Leakage Currents of Si/SiGe/Si Heterojunction Bipolar Transistors
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p249)
• SOI-Films by Zone Melting Recrystallization of Polycrystalline Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology (p507)
• Temperature Profiles Induced by Recrystallization of Silicon-on-Insulator with Scanning Incoherent Light Line Source
  Published in: Gettering and Defect Engineering in Semiconductor Technology (p631)