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Articles by author: Glenn M. Beheim

• 6H-SiC Lateral JFETs for Analog Integrated Circuits
  Published in: Silicon Carbide and Related Materials 2007 (p1099)
• Deep Reactive Ion Etching (DRIE) of High Aspect Ratio SiC Microstructures Using a Time-Multiplexed Etch-Passivate Process
  Published in: Silicon Carbide and Related Materials 2005 (p1115)
• Fabrication and Testing of 6H-SiC JFETs for Prolonged 500 °C Operation in Air Ambient
  Published in: Silicon Carbide and Related Materials 2007 (p1079)
• Fracture Origins in Miniature Silicon Carbide Structures
  Published in: Fractography of Advanced Ceramics II (p62)
• High Temperature Capacitive Pressure Sensor Employing a SiC Based Ring Oscillator
  Published in: Silicon Carbide and Related Materials 2011 (p1215)
• Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces
  Published in: Silicon Carbide and Related Materials 2001 (p251)
• Packaging Technologies for 500°C SiC Electronics and Sensors
  Published in: Silicon Carbide and Related Materials 2011 (p1033)
• Prolonged 500 °C Operation of 6H-SiC JFET Integrated Circuitry
  Published in: Silicon Carbide and Related Materials 2008 (p929)
• SiC Field Effect Transistor Technology Demonstrating Prolonged Stable Operation at 500 °C
  Published in: Silicon Carbide and Related Materials 2006 (p831)
• Silicon Carbide Differential Amplifiers for High-Temperature Sensing
  Published in: Silicon Carbide and Related Materials 2007 (p1083)