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Papers by Author: Jordi Pascual

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Homogeneity of Nitrogen and Phosphorus Co-Implants in 4H-SiC: Full Wafer Scale Investigation

Authors: Servane Blanqué, J. Lyonnet, Jean Camassel, R. Pérez, P. Terziyska, Sylvie Contreras, Philippe Godignon, Narcis Mestres, Jordi Pascual

Abstract: We report a full wafer scale investigation of the activation of nitrogen and phosphorus ions co-implanted at room temperature in a 4H-SiC semi-insulating wafer. We used a full 35 mm wafers on which, after implantation and annealing, 77 reticules with Hall bars and TLM motifs were processed. We found an average sheet resistance of 531 W/square with 30 W/square standard deviation.

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SiC Base Micro-Probe for Myocardial Ischemia Monitoring

Authors: Jordi Pascual, F. Valvo, Philippe Godignon, J. Aguiló, José Millan, Jean Camassel, Narcis Mestres

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Quantitative Evaluation of Implantation Damage and Damage Recovery after Room Temperature Ion-Implantation of N⁺ and P⁺ Ions in 6H-SiC

Authors: Servane Blanqué, R. Pérez, Marcin Zielinski, Julien Pernot, Narcis Mestres, Jordi Pascual, Philippe Godignon, Jean Camassel

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Infrared Investigation of Implantation Damage in 6H-SiC

Authors: Jean Camassel, Huiyao Wang, Julien Pernot, Philippe Godignon, Narcis Mestres, Jordi Pascual

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Study by Impedance Spectroscopy of a Layered Mullite-SiAlON-SiC Composite Prepared from a Preform by Nitridation and Oxidation

Authors: Jordi Pascual, J.R. Ramos-Barrado, A. Ramírez del Valle, P.J. Sánchez-Soto

Fabrication of Layered Mullite-SiAlON-SiC Composites from a Preform by Nitridation and Oxidation

Authors: Jordi Pascual, A. Ramírez del Valle, P.J. Sánchez-Soto

Confocal Raman Microprobe of Lattice Damage in N⁺ Implanted 6H-SiC

Authors: Narcis Mestres, F. Alsina, F.J. Campos, Jordi Pascual, Erwan Morvan, Philippe Godignon, José Millan

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Damage Reduction in Channeled Ion Implanted 6H-SiC

Authors: Erwan Morvan, Narcis Mestres, F.J. Campos, Jordi Pascual, Anders Hallén, Margareta K. Linnarsson, Andrej Yu. Kuznetsov

893

Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers

Authors: Narcis Mestres, M. Ben El Mekki, F.J. Campos, Jordi Pascual, Erwan Morvan, Philippe Godignon, José Millan, Giorgio Lulli

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