Papers by Author: Nobuhito Yoshihara

Abstract: Currently, the machining fluid includes several chemicals such as cutting oil and grinding oil is used for the machining. However, such the machining fluid that is caused enormous disposal cost and environmental load, should reduce using. Therefore, in this investigation, electric rust preventive machining method which uses only water for machining fluid is developed. Because using only water without extreme pressure agents, oil and so on, this method decreases disposal of waste machining fluid. In this paper, the system to remove impurities from a used machining fluid, and to reuse machining fluid is designed. To reproduce water efficiently, the order of arranging the filter is changed. In consequence, it has been efficient when the filtration filter is set up first, and the activated carbon filter is set up in the second. In addition, the reproduction of the water when the supply pressure is 0.75 MPa is verified by using this system. As a result, the water which passed a water recycle system, the impurities such as iron, conductivity, turbidity, colour decreased, and purification of the water is possible for this system. And, 5.2 L/min refined water recycle is achieved.

Abstract: Both form accuracy and smooth surface is required in precision grinding. And the form accuracy and surface roughness are improved year by year. However, the more the surface roughness becomes smoother, the more the grinding marks become remarkable. The grinding mark deteriorates the accuracy of optical parts. It is found that the vibration of grinding wheel is transcribed to the ground surface and forms the waviness named nano-topography. And the nano-topography causes grinding marks. In this study, relationship between the nano-topography on non-axisymmetric aspherical ground surface and grinding condition is analyzed theoretically to control the distribution of nano-topography. As a result, simulation method of nano-topography distribution is developed.

Abstract: There is a demand for high-efficiency and high surface integrity grinding of fused silica. Ductile grinding is an ideal method for producing a mirror finished surface on hard and brittle materials to significantly decrease polishing time. However, the fused silica is still difficult to ductile grind because of its high brittleness. A creep feed taper grinding method was applied to investigate the relationship between maximum grit depth of cut and surface integrity of fused silica. Ductile mode grinding was achieved on fused silica. When the depth of cut exceeds the critical wheel depth of cut, the surface suddenly changes from the ductile mode to the brittle mode. At the same ratio of wheel speed and table speed, the critical wheel depth of cut is noticeably increased by increasing the wheel speed which caused an increase in the temperature at the interface of grains and workpiece. The depth of subsurface damage (SSD) was investigated by polishing the ground surface. The experiment results show that the depth of SSD is deepest in transition mode and stables in brittle mode.

Abstract: Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness.

Abstract: Amorphous NiP plate is used as a mold of precision optical parts owing to the superior machinability. In the amorphous NiP plate, some pores, whose diameter is about 100m, are generated occasionally. At present, the amorphous NiP plates with pore are rejected. However, because size of the mold becomes large in recent years, the possibility of pores becomes high. In addition, the cost of the amorphous NiP plate also becomes high. Therefore, reparation method of the pore in the amorphous NiP plate should be developed. In this paper, laser assist powder jet deposition is proposed as a reparation method of the amorphous NiP plate. And fundamental experiments are carried out.

Abstract: . Micro ultrasonic machining (micro-USM) is an effective machining method for hard brittle materials. In the micro-USM process, the workpiece materials are machined through the accumulation of small brittle fractures generated by the impacts of abrasive grains. Therefore, it becomes difficult to obtain a smooth machined surface. In the proposed electrorheological fluid-assisted ultrasonic machining (ER fluid-assisted USM), the behavior of abrasive grains is controlled using the effect of dielectrophoretic force acting on the abrasive grains and the ER effect. The behavior of the abrasive grains can be controlled by changing the electric field distribution. In the present paper, the shape and position of the auxiliary electrode are arranged in order to control the abrasive grains to the side surface of the micro rectangular tool. By positioning the auxiliary electrode parallel to the micro rectangular tool, it becomes possible to concentrate abrasive grains to the side surface of the micro rectangular tool. Smoothing of the side surface of the workpiece by using the side surface of the micro rectangular tool is then investigated. As a result, the surface roughness of the side surface of the workpiece can be improved.

Abstract: Ultrasonic machining (USM) is an effective machining method for hard brittle materials. In the USM process, the slurry is supplied to the gap between the ultrasonic vibrating tool and the workpiece. Materials are removed by the accumulation of small brittle fractures made by the impacts of abrasive grains. In a previous study, we proposed electrorheological fluid (ER fluid) assisted-USM, and the effect of ER fluid-assisted USM was confirmed practically by machining precise micro-holes and micro-grooves on hard brittle materials. In the present paper, in order to confirm the effect of ER fluid assistance for micro USM in more detail, the behavior of abrasive grains in the machining area is observed. The effect of dielectrophoretic force acts on the abrasive grains and the effect of using ER fluid assistance are investigated. As a result, the abrasive grains can closely approach the micro tool by the effect of dielectrophoretic force and be fixed around the micro tool by the effect of ER fluid assistance. Under these conditions, the workpiece is removed primarily by the accumulation of small brittle fractures, and the chipping can be reduced.

Abstract: Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [1]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

Abstract: Ultrasonic machining (USM) is an effective method for machining of hard brittle materials. In this process, the slurry is supplied to the gap between the workpiece and the ultrasonic vibrating tool, and the materials are removed by the impacts of the abrasive grains that are pressurized by an ultrasonic vibrating tool. The purpose of this research is to achieve precise and efficient microfabrication on hard brittle materials by USM. However, in the case of microfabrication, chipping which is generally observed around the edges of machined micro holes and grooves, deteriorates the machining accuracy. In addition, there is another problem in that the machining efficiency decreases with the progress of the machining. Electrorheological fluid-assisted USM has been proposed as a countermeasure to these problems. In the present study, the problems and countermeasures associated with the machining of high-aspect ratio micro holes in hard brittle materials by electrorheological fluid-assisted USM are investigated. By positioning an auxiliary electrode under the workpiece, it becomes possible to keep the electric field high even when the machining depth becomes large. As a result, high-precision and high-aspect ratio micro holes can be machined on hard brittle materials.

Abstract: The measurement principle where in a high-NA (Numerical Aperture) surface, for which the degree of the angle of surface inclination exceeds π/3 radians, could be evaluated with high precision and high speed is proposed. This is based on the stitching method, where aspherical surface measurement becomes possible by dividing the surface of the sample into a range so that measurements can be made with an interferometer and finally combined. We examine the method of applying an interferometer to the condition in which the sample is rotated on an air spindle at a constant speed. It is not necessary in this method to make the sample static. Therefore, the vibration of the servo motor and any location errors can be eliminated. Moreover, the measurement time does not depend on the number of divided areas which are necessary for the stitching method, allowing for high-speed measurement. The principle behind this technique is expanded first, and an experiment system based on it was constructed. The principle proposed was evaluated, and its effectiveness was confirmed.