Papers by Keyword: APM

Abstract: This paper presents the results of a quaternion based extend Kalman filter (EKF) and complementary filter for ArduPilotMega (APM) attitude estimation. In addition, a new method to get the measurement noise covariance matrix R is proposed. Experimental results show that the two algorithms can meet the requirements, but the complementary filter can yield better performance than EKF.

Abstract: The present study aims at polysilicon material fill-in at re-entrant profile at flash memory product. The void was observed after polysilicon fill-in. In order to prevent the void formation, the multi-step process of deposition wet-etching deposition (DWD) method was evaluated. The DWD method is found to play beneficial roles in achieving void-free in the floating gate. The high concentration of NH₄OH in APM was choosing for wet etching solution. Scanned electron microscopy (SEM) and transmission electron microscopy (TEM) were employed to measure the polysilicon thickness and cross-section profile of device.