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Articles by keyword: «Implantation Damage»

• Dislocation Generation in Device Fabrication Process
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p439)
• EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC
  Published in: Silicon Carbide and Related Materials 2000 (p513)
• Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC
  Published in: Silicon Carbide and Related Materials 2000 (p385)
• Optical Characterization of SiC Materials: Bulk and Implanted Layers
  Published in: Silicon Carbide and Related Materials 2000 (p335)
• Planar p-n Diodes Fabricated by MeV-Energy and High-Temperature Selective Implantation of Aluminum to 4H-SiC
  Published in: Silicon Carbide and Related Materials 2000 (p731)
• Point Defects and their Diffusion in Mercury Cadmium Telluride: Investigation Based upon High-Resolution X-Ray Diffraction
  Published in: Defects and Diffusion in Semiconductors (p103)
• Quantitative Evaluation of Implantation Damage and Damage Recovery after Room Temperature Ion-Implantation of N⁺ and P⁺ Ions in 6H-SiC
  Published in: Silicon Carbide and Related Materials - 2002 (p653)
• Substitutional Gettering of Platinum by Diffusion into Ion-Beam Damaged Silicon
  Published in: Defects in Semiconductors 18 (p1985)
• Visible Light Laser Irradiation: a Tool for Implantation Damage Reduction
  Published in: Silicon Carbide and Related Materials 2003 (p941)