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Papers by Keyword: OPP

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Processing and Characterization of 300 mm Argon-Annealed Wafers

Authors: Timo Müller, E. Daub, H. Yokota, R. Wahlich, P. Krottenthaler, Wilfried von Ammon

105

Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers

Authors: A. Karoui, F.S. Karoui, De Ren Yang, George A. Rozgonyi

69

Gettering Strength Assessment Based on Lifetime Measurements

Authors: F.G. Kirscht, B. Orschel, V. Higgs, A. Buczkowski

259

Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process

Authors: Y. Kitagawara, K. Aihara, S. Oka, Takao Takenaka

1835

Relationship between Grown-In Defects and Thermal History during CZ Si Crystal Growth

Authors: K. Takano, Kazuo Kitagawa, E. Lino, M. Kimura, H. Yamagishi

1707